Small vacuum plasma device（PR60L ， PR80L）

1

Specifications of the whole machine

PR60L：920mm(W) × 960mm(D) × 1720mm（H）

PR80L：920mm(W) ×1030mm(D)×1720mm（H）

2

Vacuum chamber specifications

PR60L: Imported aluminum400(W) ×400(H)×400(D)mm

PR80L: Imported aluminum450(W) ×400(H)×450(D)mm

3

Electrode plate specifications

PR60L：6 layer flat plate electrode plate

（380(W)×310(D)mm）

PR80L：8 layer flat plate electrode plate

（420(W)×360(D)mm）

4

Control system

Touch screen + PLC control

5

Vacuum measurement system

Pirani resistance vacuum gauge

6

Gas metering system

Precision mass flow control meterMFC

7

Number of gas pathways

2 channels intake, 1 way venting

8

Plasma generator

500W&1KWPlasma generation source，40KHz

（selectable13.56MHz）

9

Working gases

2 working gases are optional：Ar2、N2、H2、O2

Features

High precision, fast response, good handling and compatibility, perfect functions and professional technical support.

Industry

It is suitable for cameras and industries, mobile phone manufacturing, semiconductor IC fields, silica gel, plastics, polymer fields, automotive electronics industry, aviation industry, etc.

Application

1. Camera and fingerprint recognition industry: Oxidation removal on the surface of the gold PAD of the soft hard bonding board; IR surface cleaning and cleansing;

2. In the field of semiconductor ICs, COB, COG, COF, ACF processes are used for cleaning before wire bonding and soldering;

3. Silicone, plastic, and polymer fields: Surface roughening, etching, and activation of silicone, plastic, and polymer.