Resin Wafer Cleaning Machine

(1) Basic Equipment Parameters

This technical agreement covers one 8-inch resin wafer post-CMP single-wafer cleaning system.

1. Basic Equipment Functions

1.1 Capable of processing 8-inch wafers.

1.2 Automatic loading/unloading. Features automated process chamber handling with dry-in/dry-out wafer transfer.

1.3 Incorporates brush cleaning, DIW ultrasonic cleaning, two-fluid cleaning, and nitrogen drying.

1.4 Automatic swing-arm cleaning mechanism, 2 cleaning chambers, PLC module, gas supply system, power supply system.

1.5 Equipped with ultrasonic flowmeter, needle valve regulation + ultrasonic flowmeter monitoring.

1.6 Multiple alarm functions with alert notifications.

1.7 Reserved interface for semiconductor equipment standard communication (SECS/GEM).

1.8 Safety doors: High-transparency PVC double-opening safety doors installed to segregate and protect personnel; front door equipped with safety sensors.

1.9 Work surface height: Approximately 950mm. Structural design ensures long-term acid corrosion resistance while maintaining sealing performance.

1.10 Modular design housed in a dedicated leak-proof chassis. Chassis fabricated using full-welded construction to eliminate leakage hazards.

leakage risks.

1.11 Internal Lighting: Replaceable acid-resistant lighting fixture (220V, 40W) above the tank.

1.12 Machine Feet: Equipped with casters and locking devices featuring corrosion-resistant bases, with height adjustment and locking functionality.

1.13 Exhaust System: Ventilation ports located at the rear/top of the main unit and tank.

1.14 Resin wafers are not configured with SC1 immersion units.

(2) Equipment Configuration Requirements:

2.1 Equipment Process Flow:

Manual loading → Robotic gripper pickup → Wafer centering → PVA brush cleaning → Dual-fluid cleaning → DIW ultrasonic cleaning/rinsing/nitrogen purging → High-speed spin drying → Manual unloading

(3) Safety Design:

① Equipment Manufacturing Standards:

1) Complies with SEMI-S2-0200 international semiconductor equipment and materials guidelines.

2) Equipment certified under ISO9001 quality management system.

② Main unit/chamber equipped with independent exhaust ducting.

③ Interlocking functions: Detailed in the software functionality description below.

④ Emergency stop switch: Button configuration and layout conform to manufacturer standards.

⑤ Comprehensive alarm and protection design: Hardware or software interlocks for exhaust pressure, liquid level, and drainage. Intuitive interface with clear prompts ensures production, process control, and safety. Three-color warning lights positioned prominently above the unit.

⑥ Electrical control, pneumatic control, and process tank control housed in a separate rear electrical cabinet. PLC-driven system  and electrical components are fully protected against acid mist corrosion to ensure stable and reliable equipment performance. All electrical components and wiring potentially exposed to acid mist are treated with PFA corrosion-resistant insulation. The electrical cabinet is filled with CDA/N2 gas to protect internal electrical control components.

⑦ Piping is located at the bottom of the equipment. All piping and valves are clearly labeled. Chemical solution lines use

PFA tubing, while pure water lines use PP tubing. Rinse wastewater is discharged through dedicated pipelines.

⑧ Safety Measures:

 ・Alarms activate during abnormal air pressure, vacuum, or other conditions. The equipment incorporates various anomaly detection mechanisms for accident prevention or device protection. Upon anomaly detection, a buzzer sounds and the specific issue is displayed on the monitor.

 ・Warning Labels: Marked at all hazardous locations; use Chinese or English; (including corrosive warning labels, toxic warning labels, scald warning labels, mechanical injury warning labels, etc.).

⑨ EMO (Emergency Stop): Each unit must have one or more EMO (Emergency Stop) buttons. When any button is pressed, the power to the relevant equipment must be shut off and disconnected by a circuit breaker.

Pause Switch: When the pause switch is pressed, mechanical actions stop and an alarm sounds.